Semiconductor package and production method thereof, and semiconductor device

ABSTRACT

A semiconductor package production method includes the step of die-cutting part of a lead side portion of a seal formed by molding and dam bars using a pedestal and punch. The pedestal has an outer surface at a position retreating from a side surface of an upper seal portion as far as possible and an inner surface generally near a side surface of a lower seal portion. Width Wa of the upper surface of the pedestal is smaller than the overhang size of the upper seal portion. Tip region Ra of the lead side portion which is present right under the overhang portion of the upper seal portion has a slanted surface Fa 1  which is sloped inwardly from top to bottom.

RELATED APPLICATIONS

This application is a Continuation Application of application Ser. No.11/659,468 filed on Aug. 27, 2007, which is the U.S. National Phaseunder 35 U.S.C. §371 of International Application No. PCT/JP2005/008697,filed on May 12, 2005, which in turn claims the benefit of JapaneseApplication No. 2004-230712, filed on Aug. 6, 2004, the disclosures ofwhich Applications are incorporated by reference herein.

TECHNICAL FIELD

The present invention relates to a semiconductor package formed of aresin or ceramic, to which an LSI chip, solid state imaging element,light-receiving/emitting element, or the like, is to be mounted, aproduction method thereof, and a semiconductor device.

BACKGROUND ART

Conventionally, the mold step for a semiconductor package has beencarried out in such a manner that, in a region adjacent to a die cavity,a lead frame which has leads and dam bars connecting the leads issandwiched between the lower die half and upper die half of the molddie, and a resin or ceramic is injected into the die cavity for molding.

In this process, as shown in FIG. 3 and FIG. 4 of Patent Document 1,resin, or the like, remains between the dam bar and a seal. This isbecause, in the mold step, the dam bar is positioned outwardly away fromthe die cavity by a predetermined distance, so that the resin, or thelike, leaks in a space surrounded by the upper and lower die halves ofthe mold die and the dam bar. After the completion of the mold step, thedam bars connecting the leads are cut in order to break the electricalconnections between the leads. It has been known, however, that theresidual resin (or ceramic) has small adhesivity to the leads andtherefore readily falls off, thereby causing various defects.

For example, in Patent Document 1, a dam bar is cut by using a resin cutdie with an elastic element such that the residual resin is removed awaytogether with the dam bar as shown in FIG. 2 of this publication.

According to a method illustrated in FIG. 1 of Patent Document 2, a dambar is cut with a side edge of a die part which supports a lead partpresent between the dam bar and a seal being positioned inner than aside edge of the lead, such that part of the residual resin remains. Theremaining resin part is removed later by an elastic element, or thelike.

Patent Document 1: Japanese Laid-Open Patent Publication No. 7-193095

Patent Document 2: Japanese Laid-Open Patent Publication No. 2003-17643

DISCLOSURE OF INVENTION Problems to be solved by the invention

There are some semiconductor packages having a so-called overhangstructure wherein part of a seal upper than a lead is larger than partof the seal lower than the lead.

FIG. 13 is a cross-sectional view showing the structure of an opticaldevice which includes a semiconductor package having a conventionaloverhang structure. At the left end of FIG. 13, the structure of across-section through resin part between leads is shown. At the rightend of FIG. 13, the structure of a cross-section through a lead isshown.

As shown in FIG. 13, the optical device includes an optical chip 101,such as a solid state imaging element, light-receiving/emitting element,LSI, or the like, a lead 102 for transmission/reception of a signalbetween the optical chip 101 and an external device, a metal wire 107for connecting the semiconductor chip 101 and the lead 102, arectangular seal 103 for sealing the lead 102, and a lid member 105attached onto the upper surface of the seal 103, such as a glass window,hologram, ceramic lid, or the like. Part of the seal 103 around the lead102 includes an upper seal portion 103 a which is present on the uppersurface side of the lead 102, a lower seal portion 103 b which ispresent on the lower surface side of the lead 102, and a lead sideportion 103 c which is sandwiched between the upper seal portion 103 aand the lower seal portion 103 b to fill the gap between the leads. Itshould be noted, however, that there are no definite borders between theupper seal portion 103 a, the lower seal portion 103 b and the lead sideportion 103 c, and that the seal 103 is integrally formed of resininjected at the time of molding.

The lid member 105 is attached onto the upper surface of the upper sealportion 103 a. The optical chip 101 is attached onto the central part ofthe lower seal portion 103 b. That is, the structure is such that theoptical chip 101 is placed in an internal space 106 surrounded by theupper seal portion 103 a, the lower seal portion 103 b, the lead sideportion 103 c and the glass window 105.

Herein, a region Rd of an outer lead 102 b at the left end of FIG. 13represents a portion from which a dam bar has been removed. Further,although not seen in FIG. 13 there is, immediately after the end of themold step, a portion of the lead side portion 103 c extending outwardbeyond the upper seal portion 103 a (residual resin). Then, at the timeof cutting the dam bar (partial die-cut step), part of the lead sideportion 103 c which is present immediately after the end of the moldstep and laterally extending beyond the overhang portion of the upperseal portion 103 a is removed together with the dam bar.

However, a tip region Rb of the lead side portion 103 c which is presentbelow the upper seal portion 103 a remains unremoved, so that there is apossibility that the tip region Rb falls off when the lead 102 is bent.After the lead 102 is bent, various steps, including attaching theoptical chip 101 onto the lower seal portion 103 b, wire bonding,attaching the glass window 105, etc., are carried out. If during thesesteps debris falling from the tip region 103 c enters the space 106 ofthe package, the debris causes a malfunction of the optical device. Forexample, if the debris adheres onto a light receiving surface of a solidstate imaging element, it causes a local dropout in an image. If thedebris adheres onto a light emitting surface or reflection mirrorsurface of a light emitting element, entry of laser light to a recordingmedium is interrupted. Also in the case of a semiconductor packageincorporating a CPU or an LSI of a memory, adhesion of debris can causedeterioration in reliability.

An objective of the present invention is to suppress the fall-off of amold material inner than a dam bar in an overhang-type semiconductorpackage and hence to provide a highly-reliable semiconductor package andproduction method thereof, and a semiconductor device.

Means for solving the problems

According to the first semiconductor package of the present invention,part of a seal which surrounds a lead includes a lower seal portionpresent under a lower surface of the lead, an upper seal portion presentover an upper surface of the lead, part of the upper seal portionoverhanging beyond the lower seal portion, and a lead side portionfilling a gap between the leads; an outer surface of the lead sideportion is slanted inwardly along a downward direction; and the width ofa tip region of the lead side portion protruding from the lower sealportion is in the range of a ⅕ to ⅘ of an overhang size of the upperseal portion.

According to the second semiconductor package of the present invention,part of a seal which surrounds a lead includes a lower seal portionpresent under a lower surface of the lead, an upper seal portion presentover an upper surface of the lead, part of the upper seal portionoverhanging beyond the lower seal portion, and a lead side portionfilling a gap between the leads; an outer surface of the lead sideportion is slanted inwardly along a downward direction; and a tip regionof the lead side portion protruding from the lower seal portion is notin contact with a portion of the outer lead which is to be bent.

The first and second semiconductor devices of the present invention areeach directed to a semiconductor device having a semiconductor chip anda semiconductor package for accommodating the semiconductor chip whereinthe structure of the semiconductor package is equal to that of the firstor second semiconductor package.

A semiconductor package production method of the present inventionincludes: forming a seal by molding, part of the seal which surroundsleads including a lower seal portion present under lower surfaces of theleads, an upper seal portion present over upper surfaces of the leads,part of the upper seal portion overhanging beyond the lower sealportion, and a lead side portion filling gaps between the leads; andthereafter, die-cutting the lead side portion using a pedestal with ablade edge width smaller than an overhang size of the upper sealportion, such that a tip region of the lead side portion extending fromthe lower seal portion has a width in the range of a ⅕ to ⅘ of anoverhang size of the upper seal portion.

With the above method, the structure of the first or secondsemiconductor package is obtained.

For die-cutting, such a punch that an angle of a blade edge closer tothe lead side portion of the seal is in the range of 95° to 120° isused, whereby the load imposed on the pedestal can be decreased, andbreakage of the pedestal, or the like, can be prevented.

For die-cutting, such a pedestal that a blade edge has a comb teeth-likeplanar shape extending toward the dam bar in a portion which is not incontact with the lead side portion of the seal is used, whereby thestrength of the pedestal is secured so that breakage of the pedestal canbe prevented.

The second semiconductor package production method of the presentinvention includes molding a mold material around at least part of theplurality of leads between the distal and proximal ends which is closerto the distal end than the dam bar using a lower die half with aprotrusion which has an outer surface in contact with the dam bar and aninner surface slanted outwardly from bottom to top and an upper die halfwhich cooperates with the lower die half to sandwich the lead frametherebetween.

With this method also, the structure of the first or secondsemiconductor package is obtained.

EFFECTS OF THE INVENTION

With the above features, when bending an outer lead, substantially noseal is present in a region of the lead side portion in which the outerlead is to be bent. Therefore, generation of debris is suppressed, andthe reliability is improved. With a semiconductor package and productionmethod thereof and a semiconductor device of the present invention,highly-reliable semiconductor package or semiconductor device with fewerdefects caused by debris of a mold material is realized.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view showing the structure of asemiconductor device according to embodiment 1 of the present invention.

FIG. 2( a) and FIG. 2( b) are a perspective view and cross-sectionalview showing the structure of a semiconductor package at the end of themold step according to embodiment 1.

FIG. 3( a) and FIG. 3( b) are a perspective view and cross-sectionalview of each of the semiconductor packages formed at the partial die-cutstep according to embodiment 1.

FIG. 4 is a cross-sectional view showing only a semiconductor package atthe end of the lead bending step according to embodiment 1.

FIG. 5( a) and FIG. 5( b) are partial cross-sectional views respectivelyshowing the structure of a pedestal and punch used in a conventionalpartial die cut step and the structure of a pedestal and punch used in apartial die cut step of embodiment 1.

FIG. 6( a) through FIG. 6( d) are, respectively, a partialcross-sectional view of a semiconductor package, a partial back view ofthe semiconductor package before lead bending, a partial perspectiveview of the semiconductor package after lead bending, and a partial backview of the semiconductor package after lead bending in the conventionalproduction process. FIG. 6( e) through FIG. 6( h) are, respectively, apartial cross-sectional view of a semiconductor package, a partial backview of the semiconductor package before lead bending, a partialperspective view of the semiconductor package after lead bending, and apartial back view of the semiconductor package after lead bending in theproduction process of embodiment 1.

FIG. 7 is a partial cross-sectional view for illustrating an appropriaterange of the width of the lower surface of the tip region of the leadside portion of the seal according to embodiment 1.

FIG. 8 illustrates the change in cutting load over the resin side bladeedge angle of the punch of embodiment 1.

FIG. 9( a) and FIG. 9( b) are a partial cross-sectional view of a seal,die and pedestal and a plan view of the pedestal, respectively, forillustrating the relationship between the planar shape of the blade edgeof the pedestal and the shape of the lead frame.

FIG. 10( a) and FIG. 10( b) are, respectively, a plan view illustratingthe positional relationship between the pedestal and die and the sealwhich are used in the conventional partial die cut step, and across-sectional view taken along line Xb-Xb which illustrates the leadside portion falling. FIG. 10( c) and FIG. 10( d) are, respectively, aplan view illustrating the positional relationship between the pedestaland die and the seal which are used in the partial die cut step ofembodiment 1, and a cross-sectional view taken along line Xd-Xd whichillustrates the lead side portion falling.

FIG. 11( a) and FIG. 11( b) are, respectively, a perspective view andplan view showing only the structure near a die cavity of the lower diehalf of a mold die of embodiment 2.

FIG. 12( a) and FIG. 12( b) are, respectively, a partial cross-sectionalview illustrating the positional relationship between the mold die andthe lead frame in the mold step of embodiment 2, and a partialcross-sectional view illustrating the structure of a seal immediatelyafter the end of the mold step.

FIG. 13 is a cross-sectional view showing the structure of an opticaldevice which includes a semiconductor package having a conventionaloverhang structure.

DESCRIPTION OF REFERENCE NUMERALS

-   -   1 Semiconductor device    -   2 Semiconductor package    -   11 Semiconductor chip    -   12 Lead    -   12 a, 20 a Inner lead    -   12 b, 20 b Outer lead    -   13 Seal    -   13 a Upper seal portion    -   13 b Lower seal portion    -   13 c Lead side portion    -   15 Lid member    -   16 Internal space    -   17 Metal wire    -   20 Lead frame    -   20 c Dam bar    -   30 Pedestal    -   30 a Protrusion    -   30 b Recess    -   31 Punch    -   32 Die    -   50 Lower die half    -   51 Dam block    -   51 a Inner surface    -   51 b Outer surface    -   52 Upper die half    -   55 Die cavity    -   Fa1 Slanted surface    -   Fa2 Lower surface    -   Ra Tip region

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1

FIG. 1 is a cross-sectional view showing the structure of asemiconductor device 1 according to embodiment 1 of the presentinvention. It should be noted that at the left end of FIG. 1, thestructure of a cross-section through resin part between leads is shown,while at the right end of FIG. 1, the structure of a cross-sectionthrough a lead is shown. As shown in FIG. 1, the optical device 1includes a semiconductor chip 11, such as a solid state imaging element,light-receiving/emitting element, LSI, or the like, a lead 12 fortransmission/reception of a signal between the semiconductor chip 11 andan external device, a metal wire 17 for connecting the semiconductorchip 11 and the lead 12, a rectangular seal 13 for sealing the lead 12,and a lid member 15 attached onto the upper surface of the seal 13, suchas a glass window, hologram, ceramic lid, or the like. Part of the seal13 around the lead 12 (specifically, two side regions) includes an upperseal portion 13 a which is present on the upper surface side of the lead12, a lower seal portion 13 b which is present on the lower surface sideof the lead 12, and a lead side portion 13 c which is sandwiched betweenthe upper seal portion 13 a and the lower seal portion 13 b to fill thegap between the leads. It should be noted, however, that there are nodefinite borders between the upper seal portion 13 a, the lower sealportion 13 b and the lead side portion 13 c, and that the seal 13 isintegrally formed of resin injected at the time of molding. On a sidewhere the lead 12 is not formed, no lead side portion exists, and it isnot necessary to zone into an upper seal portion and a lower sealportion.

The lid member 15 is attached onto the upper surface of the upper sealportion 13 a. The semiconductor chip 11 is attached onto the centralpart of the lower seal portion 13 b. That is, the structure is such thatthe semiconductor chip 11 is placed in an internal space 16 surroundedby the upper seal portion 13 a, the lower seal portion 13 b and the lidmember 15.

Part of the lead 12 which is sealed by the seal 13 and part of the lead12 which is exposed inside the internal space 16 are referred to as aninner lead 12 a, part of the lead 12 which extends outward beyond theseal 13 is referred to as an outer lead 12 b.

In this embodiment, a semiconductor package 2 is formed by the lead 12,the upper seal portion 13 a, the lower seal portion 13 b and the leadside portion 13 c. The semiconductor device 1 is formed by attaching thesemiconductor chip 11, metal wires 17 and the lid member 15 to thissemiconductor package 2.

Herein, a region Rd of the outer lead 12 b at the left end of FIG. 1represents a portion from which a dam bar has been removed. Further,although not seen in FIG. 1 there is, immediately after the end of themold step, a portion of the lead side portion 13 c extending outwardbeyond the upper seal portion 13 a.

In this embodiment, as is different from conventional packages, as forthe lead side portion 13 c which is present immediately after the end ofthe mold step, not only the part of the lead side portion 13 c laterallyextending beyond the overhang portion of the upper seal portion 13 a butalso a portion of the part of the lead side portion 13 c which existsright below the overhang portion of the upper seal portion 13 a areremoved together with the dam bar at the time of cutting the dam bar(partial die-cut step). As a result, the side surface of a tip region Raof the lead side portion 13 c is a slanted surface Fa1 which is greatlyslanted inwardly from top to bottom.

Next, a semiconductor package production process according to anembodiment of the present invention wherein a resin mold is utilized isdescribed.

FIG. 2( a) and FIG. 2( b) are a perspective view and cross-sectionalview showing the structure of a semiconductor package at the end of themold step. The left end of FIG. 2( b) shows a cross-section through nolead, while the right end of FIG. 2( b) shows a cross-section through alead. It should be noted that FIG. 2( a) and FIG. 2( b) are not drawn tothe same scale. As shown in FIG. 2( a) and FIG. 2( b), a lead frame 20is sealed between the upper seal portion 13 a and the lower seal portion13 b which are formed of a mold resin. It should be noted that, aspreviously described, there is no definite border between the upper sealportion 13 a and the lower seal portion 13 b, and that the seal 13 isintegrally formed of resin injected at the time of molding.

Part of the lead frame 20 inner than a dam bar 20 c is referred to as aninner lead 20 a, while part of the lead frame 20 outside the dam bar 20c is referred to as an outer lead 20 b. The lead side portion 13 c ofthe seal 13 exists between part of the inner lead 20 a laterallyextending from the lower seal portion 13 b and the dam bar 20 c. Thelead frame 20 includes a large number of seal formation regions. In aregion inner than the lower seal portion 13 b, the upper surface of anend of the inner lead 20 a is exposed, and wire bonding is performed onthis exposed portion.

Then, the dam bar 20 c and part of the lead side portion 13 c aredie-cut away from the structure shown in FIG. 2 (partial die-cut step).In this step, a pedestal 30, a punch 31 and a die 32 as shown in FIG.10( b) and FIG. 10( c) are used.

Thereafter, wire bonding solely or wire bonding and attachment of thelid member are performed. Then, an end of the outer lead is separatedfrom the main part of the lead frame, and the lead frame is cut along aside surface of the seal in which no lead is provided, such that eachsemiconductor package is separated from the lead frame (final die-cutstep).

FIG. 3( a) and FIG. 3( b) are a perspective view and cross-sectionalview of each of the semiconductor packages formed at the partial die-cutstep. The left end of FIG. 3( b) shows a cross-section through no lead,while the right end of FIG. 3( b) shows a cross-section through a lead.It should be noted that FIG. 3( a) and FIG. 3( b) are not drawn to thesame scale. In the partial die-cut step, the dam bar 20 c and the leadside portion 13 c are removed such that each lead is isolated from theothers.

In each semiconductor package, part of the lead 12 buried in the seal 13and part of the lead 12 present inner than the seal 13 are referred toas an inner lead 12 a, and part of the lead 12 extending outward beyondthe seal 13 is referred to as an outer lead 12 b. That is, since thereis no dam bar, the border between the outer lead 12 b and the inner lead12 a is different from that in the lead frame. As will be describedlater, the lead side portion 13 c of the lower seal portion 13 b shownin FIG. 2( a) and FIG. 2( b) is obliquely sheared by the blade edge ofthe punch and the blade edge of the pedestal, whereby the part of thelead side portion 13 c extending outward beyond the upper seal portion13 a and a portion of the part of the lead side portion 13 c whichexists right below the overhang portion of the upper seal portion 13 aare removed. Therefore, the side surface of the tip region Ra of thelower seal portion 13 b which is sandwiched between the outer leads 12 bis a slanted surface Fa1 which is slanted inwardly from top to bottom.

Thereafter, the outer lead 12 b is bent downward to have such a shapethat the semiconductor package 2 is mountable to the mother board (leadbending step).

FIG. 4 is a cross-sectional view showing only a semiconductor package atthe end of the lead bending step. The left end of FIG. 4 shows across-section through no lead, while the right end of FIG. 4 shows across-section through a lead.

At this point, in this embodiment, as will be described later, the widthof the pedestal is adjusted such that the tip region Ra of the lowerseal portion 13 b, which is part of the lead side portion, is obliquelysheared between the outer leads 12 b. Since substantially no part of thelead side portion exists around the bent portions of the outer leads 12b, generation of debris from the lead side portion at the lead bendingstep can be suppressed, and deterioration in reliability of thesemiconductor device due to such debris can be prevented. For example, alocal dropout in an image signal due to debris adhered on a lightreceiving surface of a solid state imaging element and a dropout of asignal entering a recording surface due to debris adhered on a lightemitting surface or reflection mirror surface of a light emittingelement can be prevented. Further, such a problem can be prevented thatdebris adhered to and introduced via machines used in the productionprocess adhere onto respective portions of the other semiconductorpackages.

In the process of this embodiment, before the lead bending step, thesemiconductor chip 11, such as a solid state imaging element,light-receiving/emitting element, LSI, or the like, is placed at thebottom of the cavity of the lower seal portion 13 b, and a portion ofthe semiconductor chip 11 (electrode pad) is connected to the inner lead12 a by a metal wire 17 (wire bonding step). Thereafter, after thecompletion of the above-described lead bending step, the lid member 15is fixed onto the upper surface of the upper seal portion 13 a by anadhesive, whereby the semiconductor device shown in FIG. 1 is formed.

It should be noted that the lead bending step may be performed beforethe semiconductor chip 11 is mounted to the lower seal portion 13 b,such that the semiconductor package shown in FIG. 4 is formed.

Alternatively, the lead bending step may be performed after the lidmember 15 has been attached. Also in this case, if debris are scatteredover the devices used in the production process, the debris can intrudebefore lid members are attached to the other semiconductor packages. Inview of such, application of the present invention improves thereliability.

--Comparison between Conventional Partial Die Cut and Partial Die Cut ofthis Embodiment---

FIG. 5( a) and FIG. 5( b) are partial cross-sectional views respectivelyshowing the structure of a pedestal and punch used in a conventionalpartial die cut step and the structure of a pedestal and punch used in apartial die cut step of this embodiment.

As shown in FIG. 5( a), a pedestal 130 used in the conventional partialdie cut step has a clearance generally required for a punch 131 in thepartial die cut step but has an outer surface at a position generallynear a side surface of the upper seal portion 103 a and an inner surfaceat a position generally near a side surface of the lower seal portion103 b (die not shown). Therefore, the width of the upper surface of thepedestal 130, Wb, has a value near the overhang size of the upper sealportion 103 a. In a partial die cut step in which such pedestal 130 andpunch 131 are used, shear surfaces of the lead side portion 103 c areformed substantially along the vertical direction. Thus, removed part ofthe lead side portion 103 c is substantially the part of the lead sideportion 103 c extending outward beyond the upper seal portion 103 a. Asa result, almost all the tip region Rb of the lower seal portion 103 b,which is right below the overhang portion of the upper seal portion 103a, remains as it is.

On the other hand, the pedestal 30 used in this embodiment has, as shownin FIG. 5( b), an outer surface at a site retreating from the sidesurface of the upper seal portion 13 a and an inner side surfacesubstantially near the side surface of the lower seal portion 13 b.Therefore, the width of the upper surface of the pedestal 30, Wa, has avalue much smaller than the overhang size of the upper seal portion 13a. In a partial die cut step in which such pedestal 30, punch 31 and die32 are used, shear surfaces of the lead side portion 13 c are formed inoblique directions between the lower end of the outer side surface ofthe upper seal portion 13 a and the blade edge of the punch 31. Thus,the tip region Ra of the lead side portion 13 c which is right below theoverhang portion of the upper seal portion 13 a has a slanted surfaceFa1 which is slanted inwardly from top to bottom.

In this embodiment, as shown in FIG. 5( b), the punch 31 is used whosetip end surface is slanted from a direction perpendicular to the sidesurface and whose resin side blade edge angle α is greater than 90°.However, to achieve the basic effects of this invention, the punch mayhave a resin side blade edge angle of 90°. It should be noted that, byusing a punch 31 whose resin side blade edge angle α is greater than90°, the load applied simultaneously when the dam bar 20 c and the leadside portion 13 c are cut can be reduced.

FIG. 6( a) through FIG. 6( d) are, respectively, a partialcross-sectional view of a semiconductor package, a partial back view ofthe semiconductor package before lead bending, a partial perspectiveview of the semiconductor package after lead bending, and a partial backview of the semiconductor package after lead bending in the conventionalproduction process. FIG. 6( e) through FIG. 6( h) are, respectively, apartial cross-sectional view of a semiconductor package, a partial backview of the semiconductor package before lead bending, a partialperspective view of the semiconductor package after lead bending, and apartial back view of the semiconductor package after lead bending in theproduction process of this embodiment.

Comparing the width of the lower surface Fb of the tip region Rb in theconventional production process shown in FIG. 6( a) and FIG. 6( b) andthe width of the lower surface Fa2 of the tip region Ra in theproduction process of this embodiment shown in FIG. 6( e) and FIG. 6(f), it is seen that Fa2<Fb. As shown in FIG. 6( c) and FIG. 6( d), inthe conventional production process, part of the tip region Rb iscorrupted in the lead bending step, so that debris and a slanted surfaceCb generated by corruption are shown. On the other hand, as shown inFIG. 6( g) and FIG. 6( h), in the production process of this embodiment,corruption of the tip region Ra does not occur even after the leadbending step, so that the slanted surface Fa1 and the lower surface Fa2are the shear surfaces as formed in the partial die cut step.

--Appropriate Range for Width B of Lower Surface Fa2 of Tip Region Ra--

FIG. 7 is a partial cross-sectional view for illustrating an appropriaterange of width B of the lower surface Fa2 of the tip region Ra.Hereinafter, the appropriate range of width B of the lower surface Fa2of the tip region Ra shown in FIG. 5( b) is described with reference toFIG. 7.

To prevent generation of debris of resin, or the like, in the leadbending step, the tip portion of the lower surface Fa2 of the tip regionRa is placed inner than the bend starting position of the outer lead 12b. The radius of curvature of the inner curve of the outer lead 12 b, R,is generally from 0.1 mm to 0.3 mm such that spring back is minimized.Depending on the thicknesses of the outer lead 12 b, cracks can begenerated in the outermost layers of the outer lead 12 b by forcedlybending the outer lead 12 b with a small radius of curvature. Such asize of width B of the lower surface Fa2 that debris are not generatedin the lead bending step while the above defects are prevented iscalculated.

As preconditions, the following assumptions are given.

-   -   Overhang size A: 0.4 mm    -   Thickness of lead: 0.15 mm to 0.25 mm    -   Radius of curvature of inner curve R: 0.1 mm to 0.3 mm        With these preconditions, the appropriate range of width B is        calculated.

1) The largest value of width B of the lower surface Fa2 of the tipregion Ra is calculated with:

-   -   radius of curvature R: 0.1 mm, and    -   thickness of lead: 0.15 mm.

According to the design, the bend starting position of the lower surfaceFa2 is inner than the overhang position by

2πR·(⅛)=0.0785mm.

Therefore, width B of the lower surface Fa2 is

B=0.4−0.0785=0.3215mm.

2) The smallest value of width B of the lower surface Fa2 of the tipregion Ra is calculated with:

-   -   radius of curvature R: 0.3 mm, and    -   thickness of lead: 0.25 mm.

According to the design, the bend starting position of the lower surfaceFa2 is inner than the overhang position by

2πR·(⅛)=0.2355mm.

Therefore, width B of the lower surface Fa2 is

B=0.4−0.2355=0.1645mm.

Considering the mold variation (process variation) of 0.05 mm inaddition to this value, the smallest value of width B is 0.1145 mm.

From the above calculations, width B of the lower surface Fa2 of the tipregion Ra is 80% at the largest and 28% at the smallest relative to theoverhang size A. That is, the appropriate range of width B is

(⅕)A≦B≦(⅘)A.

--Measure for Preventing Breakage of Blade Edge of Pedestal, etc.--

Where the smallest value of width B of the lower surface Fat of the tipregion Ra is 0.1145 mm as described above, the blade edge width of thepedestal 30 shown in FIG. 5( b), Wa, needs to be about 0.1 mm. If bladeedge width B of the pedestal 30 is as thin as 0.1 mm, the mechanicalstrength of the blade edge of the pedestal 30 deteriorates, so thatthere is a possibility that the blade edge breaks in the partial die cutstep. As a matter of course, the load imposed upon the blade edge in thepartial die cut step can be reduced by decreasing the cutting speed orby decreasing the number of dam bars and lead side portions die-cut atone time. In such a case, however, the production efficiencydeteriorates, and accordingly, the production cost also deteriorates.

The measures for preventing breakage of the blade edge of the pedestal30 while maintaining high production efficiency include reducing theload imposed when cutting by optimizing the resin side blade edge angleof the punch and strengthening the blade edge by optimizing the planarshape of the blade edge face of the pedestal.

1. Resin side blade edge angle of punch

Where the resin side blade edge angle of the punch 31 is set tosubstantially 90°, the load is applied simultaneously over the whole tipsurface of the punch 31 so that the cutting load is large. Therefore,when bending moment is applied to the pedestal 30 due to the largecutting load, there is a possibility of breakage of the pedestal 30.

On the other hand, in the case where the production method of thisembodiment is used, the resin side blade edge angle α of the punch 31 isset greater than 90° such that the blade edge of the punch 31 sinks intothe lead frame to gradually cut the lead frame, whereby the momentarycontact area between the punch 31 and the lead frame can be decreased.As a result, the cutting load can be greatly reduced.

FIG. 8 illustrates the change in cutting load over the resin side bladeedge angle of the punch. As shown in FIG. 8, when the resin side bladeedge angle of the punch is 95° or greater, the load can be decreased.Although not shown in FIG. 8, it has been found that the effect ofdecreasing the cutting load is obtained in the range of 95° to 120°.Further, in consideration of mass production, when the resin side bladeedge angle is in the range of 95° to 102°, a more preferable result wasobtained, i.e., the yield was especially high.

Even when in the process the position of the punch 31 is varied by about0.1 mm so that a small gap is generated between the punch 31 and theupper seal portion 13 a, the effect of bending the dam bar 20 c and thelead side portion 13 c downward occurs as shown in FIG. 5( b) at thetime when the blade edge of the punch 31 first comes in contact with thedam bar 20 c, so that a shear surface is generated between the lower endof the outer surface of the upper seal portion 13 a and the blade edgeof the pedestal 30. Thus, unremoved portions, which can turn into debrisin the future, can surely be prevented from remaining. As described inthis embodiment, even when the gap between the blade edge of thepedestal 30 and the blade edge of the punch 31 is large, a stable shearsurface can advantageously be formed between the blade edges whencutting.

The cutting load is halved in such a way, so that width Wa of the tipportion of the pedestal 30 can be a half of width Wb of the tip portionof the conventional pedestal 130.

2. Planar shape of blade edge of pedestal

FIG. 9( a) and FIG. 9( b) are a partial cross-sectional view of a seal,die and pedestal and a plan view of the pedestal, respectively, forillustrating the relationship between the planar shape of the blade edgeof the pedestal and the shape of the lead frame.

As shown in FIG. 9( b), the blade edge of the pedestal 30 hasprotrusions 30 a in the regions in contact with the inner lead 20 a ofthe lead frame and recesses 30 b in the regions in contact with the leadside portion 13 c. In other words, the blade edge of the pedestal 30 hasa comb teeth-like planar shape. The blade edge width of the recess 30 bis about 0.1 mm, and the blade edge width of the protrusion 30 a is 0.2mm or more. It should be noted that the outer surface of the protrusion30 a of the pedestal 30 is in contact with the outer surface of the die32.

With such a structure, even when bending moment caused by the dam bar 20c and the lead side portion 13 c acts on the blade edge of the pedestal30, the strength of the pedestal 30 against the bending moment can bemaintained at a high level. Therefore, the partial die cut step forpreventing generation of debris is carried out with blade edge width Wa(the blade edge width of the recess 30 b) shown in FIG. 5( a) set at 0.1mm, while the strength of the pedestal 30 is secured, whereby breakageof the pedestal 30 in the partial die cut step can be prevented.

By employing this shape which is mass-producible, the pedestal 30 can beformed of a hard metal material having excellent abrasion resistance.The hard metal is hard and excellent in abrasion resistance but is, onthe other hand, brittle and readily has chips by nature. When the hardmetal material is applied to a portion on which mechanical load isimposed, it needs to be thick to some extent. Therefore, since theabrasion resistance is improved by employing the structure shown in FIG.9( b), variation over time from the initial cut size is stabilized, andthe life cycles of parts are extended.

--Other Features--

FIG. 10( a) and FIG. 10( b) are, respectively, a plan view illustratingthe positional relationship between the pedestal and die and the sealwhich are used in the conventional partial die cut step, and across-sectional view taken along line Xb-Xb which illustrates falling ofthe lead side portion. FIG. 10( c) and FIG. 10( d) are, respectively, aplan view illustrating the positional relationship between the pedestaland die and the seal which are used in the partial die cut step of thisembodiment, and a cross-sectional view taken along line Xd-Xd whichillustrates falling of the lead side portion.

As shown in FIG. 10( a) and FIG. 10( b), the space between the bladeedge portions of the conventionally-employed die 132 supporting theouter lead 120 b and dam bar 120 c is about 0.69 mm, while the width ofthe punch 131 is 0.67 mm. Therefore, in the case of such a structure ofthe die 132, the lead side portion 103 c readily gets snagged in a spaceof the die 132, so that there is a possibility that free-fall of thelead side portion 103 c does not smoothly occur.

On the other hand, as shown in FIG. 10( c), the width of the die 32 ofthis embodiment is reduced from 0.60 mm to 0.54 mm under the lead sideportion 13 c. In the die 32 of this embodiment, the space between theblade edge portions of the die 32 supporting the outer lead 20 b and dambar 20 c is about 0.73 mm at a wider position, and the width of thepunch 31 is 0.69 mm. Thus, as shown in FIG. 10( d), in the case of thestructure of the die 32 of this embodiment, the lead side portion 13 crarely gets snagged in a space of the die 32, so that free-fall of thelead side portion 13 c smoothly occurs.

Further, generation of flash of resin, or the like, can be prevented inthe vicinity of a portion from which the lead side portion 13 c hasfallen.

Embodiment 2

Descriptions in this embodiment are directed not to a contrivance forremoving a lead side portion in the partial die cut step but tocountermeasures against debris with a contrivance in the structure of amold die in the mold process.

FIG. 11( a) and FIG. 11( b) are, respectively, a perspective view andplan view showing only the structure near a die cavity of the lower diehalf of a mold die of embodiment 2.

As shown in FIG. 11( a) and FIG. 11( b), dam blocks 51 for fillingregions surrounded by inner leads and dam bars of the lead frame areprovided on a side of a die cavity 55 of the lower die half 50 of themold die. The inner surface 51 a of the dam block 51 is sloped accordingto the slanted surface Fa of the tip region Ra of the lower seal portion13 b described in embodiment 1.

FIG. 12( a) and FIG. 12( b) are, respectively, a partial cross-sectionalview illustrating the positional relationship between the mold die andthe lead frame in the mold step, and a partial cross-sectional viewillustrating the structure of a seal immediately after the end of themold step.

As shown in FIG. 12( a), molding of a resin or ceramic is carried outwith the lead frame 20 sandwiched between the lower die half 50 and theupper die half 52 such that the outer surface 51 b of the dam block 51of the lower die half 50 is in contact with the dam bar 20 c of the leadframe and that the upper end of the inner surface 51 a of the dam block51 is substantially coincident with the lower end of the inner surfaceof the upper die half 52.

In this embodiment, the shape of the dam block 51 of the lower die half50 is determined such that the dimension in the width direction isnarrower than the dimension between leads by 0.06 mm or more. The lengthof the upper surface of the dam block 51 is smaller by 0.06 mm (i.e.,−0.06 mm) than the dimension between the outer surface of the upper sealportion 13 a and the inner surface of the dam bar 20 c shown in FIG. 11(b). The length of the lower surface of the dam block 51 is equal to thedimension between the inner surface of the dam bar 20 c and an innerposition by a ⅘ of the overhang size of the upper seal portion 13 a. Theset value for the height of the dam block 51 is a minus tolerance valueof the thickness of the lead frame 20.

As shown in FIG. 12( b), after the end of the molding step, the tipregion Ra of the lower seal portion 13 b of the seal 13 has the slantedsurface Fa1 corresponding to the inner surface 51 a of the dam block 51and the flat lower surface Fa2 corresponding to a portion which is to bereceived by the blade edge of the pedestal in embodiment 1. Namely, thesame structure as that obtained when the lead side portion is removedthrough the partial die cut step of embodiment 1 is obtained.

In this embodiment, as for the structure of the seal, the same structureas that obtained when the lead side portion is removed through thepartial die cut step of embodiment 1 is obtained. Therefore, defects dueto debris of resin or ceramic can be prevented.

In the partial die cut step, the cut thickness of resin or ceramic canbe thin. Therefore, the life of the blade edge of the pedestal can beextended. Further, the load imposed on the blade edge in the partial diecut step can be reduced, so that generation of package chips can besuppressed.

Although in the above embodiments such a type of device that the sealhas the shape of a container having an interior space has beendescribed, the present invention is also applicable to such a type ofsemiconductor device that there is no interior space and the spacesaround a semiconductor chip and metal wires are filled with a moldmaterial. Also in such a case, there is a possibility that variousdefects are caused in the production process of the semiconductor deviceby debris adhered to and introduced via machines used in the productionprocess, but application of the present invention can reduce suchdefects.

INDUSTRIAL APPLICABILITY

A semiconductor package, production method thereof, and semiconductordevice of the present invention are applicable to a semiconductor deviceincluding a solid state imaging element, light receiving/emittingelement, and LSI, such as a memory, logic, or the like, or productionmethod thereof.

1-8. (canceled)
 9. A semiconductor package comprising a plurality ofinner leads and a seal, the inner leads being buried in the seal,wherein: part of the seal which surrounds the leads includes: a firstseal portion disposed on a first surface of the inner leads; a secondseal portion disposed on a second surface of the inner leads opposite tothe first surface, part of the second seal portion extending outwardbeyond the first seal portion; and a lead side seal portion disposedbetween the first seal portion and the second seal portion, and disposedbetween the inner leads, an outer surface of the lead side seal portionis slanted inwardly from the second seal portion, and a width of a tipregion of the lead side portion protruding from the first seal portionis in the range of a ⅕ to ⅘ of an extending width of the second sealportion.
 10. A package for a semiconductor device, comprising: aplurality of inner leads; and a seal for sealing the plurality of innerleads in the package, wherein: the seal comprises: a first seal portiondisposed on a first surface of the plurality of inner leads; a secondseal portion disposed on a second surface of the plurality of innerleads opposite to the first surface; and a third seal portion forsealing side surfaces of the plurality of inner leads, the third sealportion being disposed between the first seal portion and the secondseal portion, the first, third and second seal portions are stacked inthis order along a vertical direction, the second seal portion has anextending portion extending beyond a side surface of the first sealportion in a horizontal direction perpendicular to the verticaldirection, the third seal portion has an extending portion extendingbeyond the side surface of the first seal portion in the horizontaldirection, the extending portion of the third seal portion has a sidesurface slanting inwardly to the side surface of the first seal portion,the extending portion of the third seal portion further has a flatsurface along the horizontal direction, and a width of the flat portionis ⅕ to ⅘ of a width of the extending portion of the second sealportion.